• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    PURPOSE: A mixing device having two containers is provided to mix more than two kinds of liquid. CONSTITUTION: A first container(1) is located in a second container(2) and the bottom of the first container is the bottom of the second one. The ratio of height and width of the first container is high and the cross section of the first container is getting narrow to downside. The height of the first container is extended to upper area of the second container. The first liquid can flow into the second container. The second liquid can flow into the first container. An outlet and inflow tube for the second fluid are on the lower side of the first container. The upper side of the first container is opened. Temperature controlling devices are equipped in the containers.
    公开号:KR20000022178A
    申请号:KR1019980710596
    申请日:1997-06-18
    公开日:2000-04-25
    发明作者:로베르트 보스；위르겐 풍크해넬
    申请人:페터 옐리히;울리히 비블；스테그 마이크로테크 게엠베하；
    IPC主号:
    专利说明:

    Device for mixing two or more liquids
    Technical field
    The present invention relates to a device for mixing two or more liquids by a first small container for metering a volume of the first liquid and a second large container that can be filled with the first liquid and the second liquid.
    Background technology
    In a typical device of this kind, the two containers are placed in close proximity to each other. The volume of the first liquid to be mixed with the second liquid is metered in the first small vessel and subsequently fed into a second large vessel in which the volume of the second liquid is added in a metered amount. Such a device requires a large space. Moreover, good mixing of the two liquids in the second large vessel can be achieved by further measurement, for example a stirring process.
    Detailed description of the invention
    It is therefore an object of the present invention to provide a liquid mixing device which requires less space and / or allows for good mixing of the liquids to be mixed.
    Based on the apparatus described above, this object is uniquely solved in that the first container is arranged in the second container. According to the invention, the first vessel is integrated into the second vessel, allowing smaller dimensions of the mixing device, and furthermore, longer tubing connections between the first vessel and the second vessel are discarded.
    The first container can be inserted into and secured in the second container as an independent unit. However, for cost reduction during manufacturing, it is advantageous if the bottom area of the second container is used as the bottom of the first container. According to this embodiment, in order to provide the first container in the second container, it is necessary to connect, for example, weld a cylindrical, rectangular tube, or funnel-shaped tube to the second container. As such, as in the case of mixing devices involving the processing of wafers for the manufacture of semiconductor devices and chips, a container must be manufactured and additionally of high quality, especially when used as a liquid to be mixed with erosive liquids, for example acids. It is possible to save material.
    Advantageously, the first container and / or the second container comprise sidelines for determining the level of filling. In particular, for automated determination of the filling level in connection with an automatically regulated and controlled mixing device, one or more sensors are placed within the sidelines for determining the filling level.
    In particular, it is advantageous if the ratio of the height and width of the first container is large for measuring the liquid volume of the first liquid of the smaller volume as accurately as possible. The greater the height of the vessel, the more accurate the filling level measurement. The height of the first container integrated into the second container thus extends for convenience to the upper region of the second container.
    Particularly advantageous are embodiments in which the first vessel in the cross section becomes narrower as it goes down, for example in a funnel shape in the downward direction. This allows for a wide range of mixture metering and ratios in a simple manner.
    According to a particularly advantageous embodiment of the invention, the second liquid can be introduced into the second container through the first container and advantageously can be introduced after volume metering of the first liquid in the first container. As such, the second liquid is introduced through the first vessel until a predetermined amount of charge is reached in the second vessel.
    Further advantageous embodiments of the present invention are characterized in that the second liquid can be introduced into the bottom of the first container after volume metering of the first liquid in the first container. As such, the first liquid in the first container is replaced by a second liquid such that the first liquid is discharged into the second container together with the second liquid. In light of this situation, it is particularly advantageous if the inlet tubes into which the second liquid is introduced into the first vessel each have an outlet, so that their ends are in the lower region of the first vessel. The inlet tube then extends from above in the first vessel to near the vessel bottom. Thus, the inlet opening and the pipe connection in the first vessel are not necessary and are simpler to manufacture.
    According to a further advantageous embodiment of the invention, the first vessel is open at the top and upon introduction of the second liquid, the first liquid is introduced through an opening in the top of the second vessel.
    After the first liquid has flowed into the second vessel by the second liquid across the upper opening, the second liquid is further into the second vessel through the first vessel until the predetermined fill level in the second vessel is reached. Good mixing of the liquid to be introduced and to mix with this measurement alone without further mixing elements is achieved.
    If this is required or desired in and / or around the second container, a temperature control device, for example a cooling and / or heating device, is provided, for example in the form of a pipe through which the cooling or heating liquid flows.
    The invention will be explained below with the aid of preferred embodiments in conjunction with the accompanying schematic drawings.
    Brief description of the drawings
    Referring to the drawings, the first small container 1 is contained in the second large container 2. The area 3 of the bottom 4 of the second container 2 is used as the bottom of the first container 1.
    Through the first inlet line 5, the first liquid to be mixed with the second liquid is introduced into the first vessel 1 until the desired volume of the first liquid is contained in the first vessel 1, ie the first one. The liquid is introduced until it reaches the filling level 6 of the first container 1.
    Then, the introduction of the first liquid is stopped. Through the second inlet line 7, a second liquid is introduced into the first vessel 1. The inlet tube 8 of the second inlet line 7 which enters into the first vessel 1 extends to the lower region, ie near the bottom 3 of the first vessel 1. When the second liquid is introduced into the first vessel through the second inlet line 7 and the inlet tube 8, the first liquid already contained in the first vessel 1 is forced upwards and thus the first vessel. Flow across the opening at the top of the. The second liquid then flows through the first vessel 1 into the second vessel until a predetermined fill level 9 of the second vessel 2 is reached. Replacement of the first liquid by the second liquid from the first vessel 1 into the second vessel 2 and subsequently further introduction of the second liquid via the first vessel 1 and across the upper opening. This results in good homogeneous mixing of the two liquids to be mixed in the second vessel 2 so that no further mixing element is required.
    After completion of the mixing process, the mixed liquid is removed through the inlet line 10 of the second vessel 2 for a particular purpose. The first vessel 1 comprises an outlet line which allows the first vessel 1 to be emptied to allow volume metering of the first liquid for a new mixing process within the vessel 1.
    In the embodiment shown, a cooling or heating coil 12 is provided having inlet and outlet lines 12, 14 for cooling or heating fluid.
    The mixing apparatus of the present invention can be preferably used in connection with a processing tank for wafer processing. When used for this purpose, the first liquid is for example hydrofluoric acid and the second liquid is demineralized water. The filling and removal process is performed automatically by measuring the filling level using sensors and a control and adjustment system that can control the automatic operation of the mixing device.
    The present invention has been described with the aid of preferred embodiments. However, many variations will be apparent to those skilled in the art without changing the spirit of the invention. For example, it is possible to provide one or more additional containers 1 in the second container 2 to mix two or more liquids in the manner of the present invention. Further possible uses using the principles of the present invention provide a cascade-like mixing process in which an additional container embodied in accordance with the described first container 1 can be provided in the first container 1 so that two or more liquids can be mixed. Can be created.
    权利要求:
    Claims (15)
    [1" claim-type="Currently amended] An apparatus for mixing two or more liquids by a first small container (1) for metering a volume of a first liquid, and a second large container (2), which can be filled with a first liquid and a second liquid, The device characterized in that the first container (1) is arranged in the second container (2).
    [2" claim-type="Currently amended] Device according to claim 1, characterized in that the bottom area (3) of the second container (2) is the bottom of the first container (1).
    [3" claim-type="Currently amended] Apparatus according to claim 1 or 2, characterized in that at least one sensor (6,9) is provided for determining the filling level in the first vessel (1), the second vessel (2) or both.
    [4" claim-type="Currently amended] The device according to claim 1, wherein the first container, the second container, or both have side lines.
    [5" claim-type="Currently amended] 5. The device according to claim 1, wherein the ratio of the height to the width of the first container is large. 6.
    [6" claim-type="Currently amended] Device according to one of the preceding claims, characterized in that the first container (1) has a cross-sectional area that becomes narrower downwards.
    [7" claim-type="Currently amended] 7. The device of claim 6, wherein the first container is funnel shaped.
    [8" claim-type="Currently amended] Device according to one of the preceding claims, characterized in that the height of the first container (1) extends to the upper region of the second container (2).
    [9" claim-type="Currently amended] Device according to one of the preceding claims, characterized in that the second liquid can be introduced into the second container (2) through the first container (1).
    [10" claim-type="Currently amended] 10. The device according to claim 9, characterized in that after the volume metering of the first liquid in the first container (1), a second liquid can be introduced into the first container (1).
    [11" claim-type="Currently amended] Device according to claim 9 or 10, characterized in that after volume metering of the first liquid in the first vessel (1), it can be introduced into the lower region of the first vessel (1).
    [12" claim-type="Currently amended] 12. The inlet pipe (8) according to any one of the preceding claims, characterized in that a second liquid inlet (8) is present in the first container (1) having an outlet in the lower region of the first container (1). Device.
    [13" claim-type="Currently amended] The device according to claim 1, wherein the upper part of the first container is open.
    [14" claim-type="Currently amended] 12. The device according to claim 11, characterized in that, upon introduction of the second liquid into the first container (1), the first liquid can be pushed into the second container (2) through an upper opening.
    [15" claim-type="Currently amended] The device according to claim 1, wherein a temperature regulating device is provided in the second container, in the container or both.
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    同族专利:
    公开号 | 公开日
    DE59702214D1|2000-09-21|
    JP3174070B2|2001-06-11|
    JPH11513931A|1999-11-30|
    EP0914196A1|1999-05-12|
    DE19625651C2|2000-11-30|
    WO1997049483A1|1997-12-31|
    TW362042B|1999-06-21|
    EP0914196B1|2000-08-16|
    AT195438T|2000-09-15|
    DE19625651A1|1998-01-08|
    US20010038574A1|2001-11-08|
    ID17170A|1997-12-04|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1996-06-26|Priority to DE1996125651
    1996-06-26|Priority to DE19625651.8
    1997-06-18|Application filed by 페터 옐리히;울리히 비블, 스테그 마이크로테크 게엠베하
    2000-04-25|Publication of KR20000022178A
    2001-11-02|Application granted
    2001-11-02|Publication of KR100304309B1
    优先权:
    申请号 | 申请日 | 专利标题
    DE1996125651|DE19625651C2|1996-06-26|1996-06-26|Device for mixing at least two liquids|
    DE19625651.8|1996-06-26|
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